Facilities

Hybrid Sputtering-Evaporation Chamber

Materials Research Laboratory

Center for Microanalysis of Materials

Laser Lab

MicroFab

IC Fabrication Lab (ECE 444)

News
Professor Angus A. Rockett • Phone: (217) 333-0417 • Fax: (217) 333-2736 • Email: arockett@uiuc.edu